Secondary Ion Mass Spectrometry (SIMS)

The secondary ion mass spectrometry is one of the established material analysis techniques. For generating concentration depth profiles of elements SIMS is used as a standard method. Investigations close to the surface set typical range of 5 nm to 20 µm and a lateral range from 50 up to 500 µm. The determination of concentrations (quantitative analyses) of all elements in the mass range from hydrogen to uran allow a valuation of the material quality of solids. In addition to depth profiles surface images with a lateral solution up to the µm range facilitates an topografical valuation of the material structure. Additionally, it is possible to determine the spacial element distribution and make it visible by imaging techniques. Using the Cameca spectrometers it is possible to determine elements in concentrations in ranges of ppb.